|
|
|
* Ordering information
* Specifications
* Configurations
* Dimensions, and etc
|
|
can be found in our PDF brochure.
|
|
Photomicrosensors for
Detecting Wafer-carrier Mounting
-
The mounting position is set with a
pedestal.
-
The contact surface with the wafer carrier
uses a special chemical-resistant fluoro-resin.
-
The unique optical system enables stable
detection of almost all wafer-carriers.
-
Light modulation effectively reduces
external light interference.
-
Utilizes talc-free clean cables.
|
Sitemap
