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Semiconductor Industry Solutions using Omron Sensing & Control



	Implementation of Safety Solution in Control System
	Omron Provides Total Safety Solution

	Redundancy System in Utility Equipment
	No.1 Line Up Liquid Leakage Detection Sensor to Solve Your Application
	A New Handy Reader Capable of Reading Directly Marked Codes

	CIDRW Improves Wafer Carrier/Reticle Management
	Effective Wafer Level Management for Small Lot Production

	High-Precision Displacement Measurement through a View Port
	High-Precision Positioning that is Not Influenced by Temperature or View Port Degradation
	Open Network Controller Enables Collection of Process Data
	Improvement on Efficiency of Semiconductor Manufacturing Process
	SYSMAC SPU Allows for Faster System Start-up
	Loop Controller Allows High Speed and High Accuracy Analog Process Control
	Omron's Gradient Temperature Control Algorithm Provides Wafer Heating Uniformity
	In-plane Uniform Control to Improve Yield
	Multi-point Uniform Temperature Control by GTC Algorithm
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by High-speed and Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller with High Reliability

	Stable Detection of Glass Substrate
	High Precision and Stability at Nano-meter Level
	Ideal for Large-size LCD Panel Stick-out Detection
	High Precision and Stable Alignment of Images

	Power Supply with Improved Reliability!
	S8M Provides Safety on the Secondary DC Circuit
	S8VM Offers New Undervoltage Alarm Function

CIDRW (Carrier ID Reader/Writer) Improves Wafer Carrier / Reticle Management

Omron's Product:

V640 Series

Electromagnetic Inductive RFID System for Semiconductor Industry

Conforms to SEMI E 15.1, E4, E99, so R&D investment can be reduced.
Provides industry’s highest functionality and performance with a wide range of variety.
Reads/Writes data embedded in a glass single/multiple transponder where long distance communication range up to 120 mm is available.

Wafer Carrier Management: Unlike production control systems that uses bar codes, repeated exchanges with the host are not necessary, allowing for a simpler production program and system. Reticle Control: The reticle stored in the pod can be checked and identified by reading the information in the ID Tag mounted to the pod.